CR Series Ultra-Flexible Clean-Grade Stainless Steel Bellows

The CR Series ultra-flexible clean-grade stainless steel bellows are engineered for semiconductor, UHV, and high-precision motion systems. Made from 304/316L stainless steel, they feature dynamic flexibility, low spring rates, and exceptional helium leak tightness down to 1x10^-9 Pa·m³/s. Available with BA tube ends, VCR male/female, and VCO fittings.

CR Series Ultra-Flexible Clean-Grade Stainless Steel Bellows

The CR Series ultra-flexible stainless steel bellows are designed for semiconductor manufacturing, ultra-high vacuum (UHV) systems, and precision motion control applications. Engineered with low spring rates and high stroke durability, these clean-grade bellows provide reliable vacuum seal performance under demanding operating conditions.

Key Features & Advantages

Ultra-High Vacuum Tightness: Helium leak detection rate reaches ≤ 1 × 10⁻⁹ Pa·m³/s.
High-Purity Materials: Manufactured from premium 304 / 316L stainless steel for optimal corrosion resistance and long flex life.
Superior Flexibility: Dynamic thin-wall structure designed for high stroke frequency and low stress wear.
Cleanroom Standard: Cleaned and packaged under strict cleanroom conditions to prevent hydrocarbon and particle contamination.
Flexible End Options: Compatible with BA straight tube ends, VCR male/female fittings, and VCO connections.

Technical Specifications

Parameter	Specification
Material	Bellows: SS304 / SS316L \| Fittings: SS304 / SS316L
Helium Leakage Rate	≤ 1 × 10⁻⁹ Pa·m³/s
Operating Pressure	Vacuum to 0.1 MPa (Optional braided mesh up to 1.6 MPa)
Operating Temperature	-196 °C to +450 °C
End Connection Types	BA Straight Tube, VCR Male/Female, VCO Fittings
Wall Thickness	Single-layer / Multi-layer thin-wall options